Title :
Measurement of Nanometer Topography by Scanning Tunneling Microscope
Author :
Kobayashi, Y. ; Okayama, S. ; Komuro, M. ; Okano, M. ; Watanabe, S. ; Homma, A.
Author_Institution :
Kosaka Laboratory Ltd.
Abstract :
Scanning tunneling microscopes (STM) of two different types were developed for measurement of nanometer order three-dimensional topography. Topographic maps of fine grid patterns on Si substrate fabricated by focused ion-beam lithography, optical grating and a compact disk stamper were obtained with resolution of around 10 nm by using electrochemically formed tips.
Conference_Titel :
Precision Electromagnetic Measurements, 1988. CPEM 88 Digest. 1988 Conference on
Conference_Location :
Ibaraki, Japan
DOI :
10.1109/CPEM.1988.671326
