Title :
Emerging CMOS-Devices and Applications
Author :
Fabel, B. ; Maul, T. ; Nowack, L. ; Sterkel, M. ; Hansch, W.
Author_Institution :
Tech. Univ. Munich, Munchen
Abstract :
The continuous shrinking of CMOS devices forces the development of new technologies, emerging devices and applications. Examples of research in these fields are presented.
Keywords :
CMOS integrated circuits; CMOS-devices; circuit applications; nanotechnologies; Atomic layer deposition; Bonding; CMOS technology; Circuits; High K dielectric materials; Hydrogen; Nitrogen; Silicon; Temperature; Thermal resistance;
Conference_Titel :
Integrated Circuits, 2007. ISIC '07. International Symposium on
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-0797-2
Electronic_ISBN :
978-1-4244-0797-2
DOI :
10.1109/ISICIR.2007.4441873
