DocumentCode :
2909727
Title :
SAW resonators at high temperatures
Author :
Buff, W. ; Binhack, M. ; Klett, S. ; Hamsch, M. ; Hoffmann, R. ; Krispel, F. ; Wallnöfer, W.
Author_Institution :
Tech. Univ., Ilmenau, Germany
Volume :
1
fYear :
2003
fDate :
5-8 Oct. 2003
Firstpage :
187
Abstract :
This paper discusses SAW resonators. The SAW device consists of a piezoelectric substrate with a metalization. It is shown that the sytems langasite-Pt and gallium orthophosphate-Pt are able to fulfill the demands for a high temperature operation. An AFM scan of metalization is also available.
Keywords :
atomic force microscopy; electric admittance; gallium compounds; high-temperature effects; lanthanum compounds; metallisation; piezoelectric materials; platinum; surface acoustic wave resonators; thermal stability; AFM; La3Ga5SiO14-Pt; Pt-GaPO4; SAW device; SAW resonators; gallium orthophosphate; langasite; metalization; piezoelectric substrate; platinum; Circuits; Crystalline materials; Pollution measurement; Pyroelectricity; Surface acoustic wave devices; Surface acoustic waves; Temperature distribution; Temperature measurement; Temperature sensors; Wireless sensor networks;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
Type :
conf
DOI :
10.1109/ULTSYM.2003.1293385
Filename :
1293385
Link To Document :
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