A 3-dimensional finite element approach for simulating acoustic wave propagation in layered SAW devices

Author

Ippolito, Samuel J. ; Kalantar-zadeh, Kourosh ; Powell, David A. ; Wlodarski, Wojtek

Author_Institution

Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic., Australia

Volume

1

fYear

2003

fDate

5-8 Oct. 2003

Firstpage

303

Abstract

A finite-element model is investigated for the 3-dimensional transient analysis of a two-port delay line layered SAW device. The structure is a XY LiNbO₃ substrate with a ZnO guiding layer. The effect of electromagnetic feed-through and wave propagation of each displacement component in distinct directions are investigated. The frequency response obtained by the finite-element model shows good agreement with experimental data whilst also providing a useful insight to surface acoustic wave propagation in layered media.

Keywords

acoustic wave propagation; finite element analysis; surface acoustic wave delay lines; transient analysis; LiNbO₃-ZnO; acoustic wave propagation; electromagnetic feed-through effect; finite element analysis; surface acoustic wave delay lines; three dimensional transient analysis; tow port delay line layered SAW devices; tow port delay line layered surface acoustic wave devices; Acoustic propagation; Acoustic waves; Delay lines; Electromagnetic propagation; Electromagnetic scattering; Finite element methods; Frequency response; Surface acoustic wave devices; Transient analysis; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics, 2003 IEEE Symposium on

Print_ISBN

0-7803-7922-5

Type

conf

DOI

10.1109/ULTSYM.2003.1293411

Filename

1293411