Concurrent design for ultra-precision vibration isolation platform

An ultra-precision vibration isolation platform composes of a mechanical structure and a feedback controller. Conventionally, these two elements are designed sequentially, with the controller design subsequent to that of the mechanical structure design. The traditional design method cannot obtain the global optimum performances for the system. This paper presents an approach to integrate structural and control parameters optimization for an ultra-precision vibration isolation platform via LMIs concurrent design. A set of weight matrices of the cost function is obtained by a large number of simulations. The simulation results effectively demonstrate that the ultra-precision vibration isolation platform via LMIs concurrent design has good isolation performance against the floor disturbance and the direct disturbance over wide frequency range.