Title :
Vibrational distribution measurement of piezoelectric devices using laser speckle and image processing techniques
Author :
Watanabe, Yasuaki ; Goka, Shigeyoshi ; Sato, Takayuki ; Sekimoto, Hitoshi
Author_Institution :
Graduate Sch. of Eng., Tokyo Metropolitan Univ., Japan
Abstract :
Fast visualization techniques for vibrational distribution in piezoelectric devices are described. The methods are based on the speckle interference on the device surface, and apply a two-dimensional correlation filter to speckle image data for the driven and resting phases of the devices. In spite of having a short measurement time, these methods produce very clear high-contrast vibrational-distribution images. The experimental results for quartz resonators with rough or polished surfaces demonstrate the applicability of the proposed method.
Keywords :
crystal resonators; image processing; piezoelectric devices; quartz; vibration measurement; SiO2; correlation filter; image processing; laser speckle; piezoelectric devices; quartz resonators; speckle image data; speckle interference; vibrational distribution measurement; vibrational-distribution images; Data visualization; Image processing; Interference; Piezoelectric devices; Resonator filters; Rough surfaces; Speckle; Surface roughness; Time measurement; Vibration measurement;
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
DOI :
10.1109/ULTSYM.2003.1293453