The International Technology Roadmap for Semiconductors (ITRS): "Past, present and future"

It is the purpose of the 1999 ITRS, of the 2000 ITRS Update, and of future ITRS documents, to provide a set of up-to-date reference documents of requirements, potential solutions, and their timing for the semiconductor industry. These documents have already provided a common reference for international forums that have initiated discussions on cooperation among the leading silicon semiconductor manufacturers and the leading suppliers of equipment, materials, and software, as well as researchers from university and government laboratories. It is hoped that in the near future, through cooperative efforts among the various ITRS participants, the challenge of R&D investments will be more effectively and more uniformly shared by the whole semiconductor industry.