A Self-Resonant MEMS-Based Electrometer

Author

Denison, Timothy A. ; Shafran, John S. ; Kuang, Jinbo ; Lundberg, Kent H.

Author_Institution

Medtronic, Minneapolis

fYear

2007

fDate

1-3 May 2007

Firstpage

1

Lastpage

5

Abstract

A configurable MEMS electrometer that allows for isolated, high-input-impedance voltage measurements is presented. By adjusting the separation between the measurement surface and a vibrating MEMS element, the noise floor and/or maximum dynamic range can be tailored to the specific application. This device is useful for a broad range of applications, including pH meters, biopotential amplifiers, xerography, and measuring leakage on high-voltage capacitors.

Keywords

microsensors; voltage measurement; voltmeters; biopotential amplifiers; configurable MEMS electrometer; electric field sensor; flicker noise; high-input-impedance voltage measurements; high-voltage capacitors; leakage measurement; measurement surface; noise floor; pH meters; self-resonant MEMS-based electrometer; vibrating MEMS element; xerography; 1f noise; Area measurement; Electric variables measurement; Electrostatic discharge; Geophysical measurements; Leakage current; Micromechanical devices; Noise measurement; Temperature sensors; Voltage measurement; MEMS; electric-field sensor; electrometer; flicker noise; self-resonant feedback;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference Proceedings, 2007. IMTC 2007. IEEE

Conference_Location

Warsaw

ISSN

1091-5281

Print_ISBN

1-4244-0588-2

Type

conf

DOI

10.1109/IMTC.2007.379381

Filename

4258284