Title :
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
Abstract :
Presents the front cover and table of contents from the conference proceedings.
Keywords :
micromechanical devices; BioMEMS; actuators; device modeling; fabrication; industrial sensors; mechanical sensors; micro-electro-mechanical systems; microcoolers; microfluidics; micropumps; packaging; probes;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906461
