Title :
Challenges in the application of hybrid reluctance actuators in scanning positioning stages in vacuum with nanometer accuracy and mGauss magnetic stray field
Author :
van Lievenoogen, Anne ; Toma, A. ; Ummethala, Upendra
Author_Institution :
Mechatron. Dept., Philips Innovation Services, Eindhoven, Netherlands
Abstract :
The actuators used in high precision applications have come a long way from simply electro-motors to become mechatronic system components which achieve accuracy by being robust against disturbances and having a highly predictable behavior.
Keywords :
electric actuators; electromotor; hybrid reluctance actuator; mGauss magnetic stray field; mechatronic system component; scanning positioning stage; Actuators; Coils; Force; Magnetic levitation; Permanent magnets; Software; Technological innovation;
Conference_Titel :
American Control Conference (ACC), 2013
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4799-0177-7
DOI :
10.1109/ACC.2013.6580662
