• DocumentCode
    2913887
  • Title

    Challenges in the application of hybrid reluctance actuators in scanning positioning stages in vacuum with nanometer accuracy and mGauss magnetic stray field

  • Author

    van Lievenoogen, Anne ; Toma, A. ; Ummethala, Upendra

  • Author_Institution
    Mechatron. Dept., Philips Innovation Services, Eindhoven, Netherlands
  • fYear
    2013
  • fDate
    17-19 June 2013
  • Firstpage
    5286
  • Lastpage
    5289
  • Abstract
    The actuators used in high precision applications have come a long way from simply electro-motors to become mechatronic system components which achieve accuracy by being robust against disturbances and having a highly predictable behavior.
  • Keywords
    electric actuators; electromotor; hybrid reluctance actuator; mGauss magnetic stray field; mechatronic system component; scanning positioning stage; Actuators; Coils; Force; Magnetic levitation; Permanent magnets; Software; Technological innovation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    American Control Conference (ACC), 2013
  • Conference_Location
    Washington, DC
  • ISSN
    0743-1619
  • Print_ISBN
    978-1-4799-0177-7
  • Type

    conf

  • DOI
    10.1109/ACC.2013.6580662
  • Filename
    6580662
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2913887