Title :
High performance accelerometer based on CMOS technologies with low cost add-ons
Author :
Brandl, M. ; Kempe, V.
Author_Institution :
Austria Mikro Syst. Int. AG, Unterpremstaetten, Austria
Abstract :
Austria Mikro Systeme International has developed a high performance, one axis accelerometer with capacitive readout for the automotive sensor market. The full-scale range is customizable from 1 g to 200 g. The novel sensor concept combines the advantages of monolithic and hybrid concepts and focuses on mature, high yield/low cost batch fabrication process modules. Industrialization and performance capabilities of the sensor concept have been demonstrated.
Keywords :
CMOS integrated circuits; accelerometers; automotive electronics; capacitive sensors; microsensors; CMOS technology; MEMS device; accelerometer; automotive sensor; batch fabrication; capacitive readout; Accelerometers; Automotive engineering; CMOS technology; Circuit testing; Costs; Fabrication; Micromechanical devices; Packaging; Signal processing; System testing;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906465
