• DocumentCode
    2913975
  • Title

    Excimer Laser Crystallisation and Processing Of Polysilicon Thin Film Transistors

  • Author

    Pribat, D.

  • fYear
    1996
  • fDate
    8-13 Sept. 1996
  • Firstpage
    334
  • Lastpage
    334
  • Keywords
    Crystallization; Germanium silicon alloys; Optical films; Optical modulation; Pulsed laser deposition; Reflectivity; Semiconductor films; Silicon alloys; Silicon germanium; Thin film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
  • Conference_Location
    Hamburg, Germany
  • Print_ISBN
    0-7803-3169-9
  • Type

    conf

  • DOI
    10.1109/CLEOE.1996.562583
  • Filename
    562583
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2913975