Title :
Ultra-precision micro structuring by means of mechanical machining
Author :
Kawai, T. ; Sawada, K. ; Takeuchi, Y.
Author_Institution :
FANUC Ltd., Oshino, Japan
Abstract :
A variety of microstructures with high accuracy were introduced by means of mechanical machining technology, using the authors´ super-nano friction free machine.
Keywords :
micromachining; micromechanical devices; nanotechnology; mechanical machining; super-nano friction free machine; ultra-precision microstructuring; Etching; Lithography; Machining; Manufacturing; Mass production; Micromechanical devices; Milling; Optical filters; Servomotors; Shape;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906469
