A gyroscope array with linked-beam structure

Author

Seokyu Kim ; Byeungleul Lee ; Joonyeop Lee ; Kukjin Chun

Author_Institution

Sch. of Electr. Eng., Seoul Nat. Univ., Kwanak, South Korea

fYear

2001

fDate

25-25 Jan. 2001

Firstpage

30

Lastpage

33

Abstract

This paper presents a gyroscope array with linked-beam structure. The proposed gyroscope was fabricated by surface micromachining technology with 15 /spl mu/m-thick polycrystalline silicon. A dichloro-dimethylsilane (DDMS, (CH/sub 3/)/sub 2/SiCl/sub 2/) grafting as a new anti-stiction method was used to release up to a 9-cell gyroscope array. This paper analyzes the feasibility of the gyroscope array with capacitive inertial sensing as a high performance gyroscope with respect to thermal and rotational noise. The fabricated quad-cell gyroscope shows that the electrical noise equivalent rate is about 0.01 deg/sec, sensitivity is 93 mV/deg/sec, and its dynamic range is 100 deg/sec.

Keywords

arrays; capacitive sensors; gyroscopes; micromachining; 9-cell array; anti-stiction method; capacitive inertial sensing; dichloro-dimethylsilane; dynamic range; electrical noise equivalent rate; gyroscope array; linked-beam structure; polycrystalline silicon; sensitivity; surface micromachining; Acceleration; Application software; Costs; Energy loss; Gyroscopes; Mechanical sensors; Micromachining; Resonant frequency; Semiconductor device noise; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on

Conference_Location

Interlaken, Switzerland

ISSN

1084-6999

Print_ISBN

0-7803-5998-4

Type

conf

DOI

10.1109/MEMSYS.2001.906471

Filename

906471