Title :
A surface micromachined resonant beam pressure sensor
Author :
Melvas, P. ; Kalvesten, E. ; Stemme, G.
Author_Institution :
Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden
Abstract :
The first entirely surface micromachined resonant beam pressure sensor is presented. Using a fully surface micromachined process an encapsulated beam resonant pressure sensor with a pressure sensitive diaphragm of 100/spl times/150/spl times/2 /spl mu/m has been fabricated. The resonating beam is fully enclosed inside the reference vacuum cavity formed beneath the diaphragm. The new design enables high pressure sensitivity and a miniature chip size, essential for sensors such as catheter mounted intravascular blood pressure sensors. The pressure sensitivity is measured to 3.2%/bar with a beam resonance frequency at about 700 kHz.
Keywords :
blood pressure measurement; diaphragms; micromachining; micromechanical resonators; microsensors; pressure sensors; 700 kHz; beam resonance frequency; catheter mounted intravascular blood pressure sensors; encapsulated beam sensor; pressure sensitive diaphragm; pressure sensitivity; reference vacuum cavity; resonant beam pressure sensor; surface micromachining; Arteries; Catheters; Optical interferometry; Optical resonators; Optical sensors; Piezoresistance; Pressure measurement; Resonance; Sensor phenomena and characterization; Sensor systems;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906473
