Micromachining techniques for liquid crystal polymer

Author

Xuefeng Wang ; Liang-Hsuan Lu ; Chang Liu

Author_Institution

Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA

fYear

2001

fDate

25-25 Jan. 2001

Firstpage

126

Lastpage

130

Abstract

This paper reports newly developed microfabrication techniques for liquid crystal polymer (LCP) for the first time. LCP is a thermal plastic polymer with regularly aligned molecule chains. It exhibits excellent electrical, physical, and chemical properties, which make it suitable for many MEMS applications. The chemical compatibility of LCP with commonly used chemicals is investigated in this work. MEMS fabrication processes such as metallization, plasma bulk etching, and low temperature thermal lamination have been developed. These micromachining techniques are successfully demonstrated by the development of a microfluid channel system composed of LCP/glass assembly.

Keywords

liquid crystal polymers; metallisation; microfluidics; micromachining; sputter etching; MEMS fabrication; liquid crystal polymer; metallization; microfluidic system; micromachining; plasma etching; thermal lamination; Chemicals; Fabrication; Liquid crystal polymers; Metallization; Micromachining; Micromechanical devices; Plasma applications; Plasma chemistry; Plasma temperature; Plastics;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on

Conference_Location

Interlaken, Switzerland

ISSN

1084-6999

Print_ISBN

0-7803-5998-4

Type

conf

DOI

10.1109/MEMSYS.2001.906495

Filename

906495