Title :
Fabrication of micro parts using only electrochemical process
Author :
Watanabe, N. ; Suda, M. ; Furuta, K. ; Sakuhara, T.
Author_Institution :
Seiko Instrum. Inc., Chiba, Japan
Abstract :
We have investigated two kinds of electrochemical processes that scan a processing electrode to fabricate metal micro parts. They are, electroforming on the mold made by electrochemical processing, and shape forming by electrochemical processing after electroplating. An electroformed Ni gear with diameter of 600 /spl square/m and thickness of 100 /spl square/m was fabricated by the former method, and a Ni gear with diameter of 1700 /spl square/m and thickness of 30 /spl square/m was fabricated by the latter method.
Keywords :
electroforming; electroplating; micromechanical devices; moulding; nickel; Ni; electrochemical process; electroforming; electroplating; fabrication; metal micro-part; molding; nickel gear; Costs; Electrodes; Etching; Fabrication; Gears; Lithography; Nickel; Production; Shape; Synchrotron radiation;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906499
