A magnetically damped momentum transfer device to reduce chatter in a micro-mechanical switch

A micro-mechanical switch has been designed and fabricated in which the bounce after contact closure has been reduced by using mechanical momentum transfer and magnetic damping, while maintaining high contact forces. The period of chatter has been reduced from 1.5 milliseconds to less than 0.3 milliseconds, while the switching speed is 5 millisecond. The switch has been fabricated using Permalloy (78% Ni and 22% Fe) and copper. The LIGA process was used in the fabrication of the switch. An improved copper process allowed the fabrication of high aspect ratio (20:1) structures which were subsequently freed and assembled.