Title :
Fabrication of micro power source (MPS) using a micro direct methanol fuel cell (/spl mu/DMFC) for the medical application
Author :
Woo Young Sim ; Geun Young Kim ; Sang Sik Yang
Author_Institution :
Dept. of Electron. Eng., Ajou Univ., Suwon, South Korea
Abstract :
This paper presents the fabrication and test of a micro power source (MPS) using a micro direct methanol fuel cell (/spl mu/DMFC). Micro power sources are essential for cellular phones, portable electronics and MEMS devices to be miniaturized. The /spl mu/DMFC has a simple structure. The /spl mu/DMFC consists of one proton exchange membrane (PEM) and two silicon substrates with channels. The width and the depth of the micro channel are 250 /spl mu/m and 50 /spl mu/m, respectively. The dimension of one unit of /spl mu/DMFC is 16 mm/spl times/16 mm/spl times/1.2 mm. When fuel (methanol:water=1:1) is supplied to the fabricated cell, the measured output voltage is 100 mV at 25/spl deg/C and the atmospheric pressure.
Keywords :
micromechanical devices; proton exchange membrane fuel cells; 1.2 mm; 100 mV; 16 mm; 25 C; 250 mum; 50 mum; depth; medical application; micro direct methanol fuel cell; micro power source; output voltage; proton exchange membrane; width; Atmospheric measurements; Biomembranes; Cellular phones; Fabrication; Fuel cells; Methanol; Microelectromechanical devices; Protons; Silicon; Testing;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906548
