Title :
Micro capillaries array head for direct drawing of fine patterns
Author :
Ohigashi, R. ; Tsuchiya, K. ; Mita, Y. ; Fujita, H.
Author_Institution :
Central Res. Inst., DAI Nippon Printing Co. Ltd., Chiba, Japan
Abstract :
Free-space micro ink streams are realized using an array of micro capillaries. Ink is ejected from capillaries accelerated by an electric field with low or no back pressure applied. The capillaries are 20 /spl mu/m in diameter, whereas the micro streams are only a few micrometers thick due to the Taylor cone effect. This method enables one to draw very fine lines without lithographical techniques. By applying an AC field, dotted lines can also be drawn. Direct drawing of both solid and dotted lines have successfully been demonstrated by applying DC and 500 Hz AC fields, respectively.
Keywords :
capillarity; etching; jets; liquid crystal displays; microfluidics; micromachining; 20 micron; 500 Hz; AC field; DC fields; Taylor cone effect; back pressure; direct drawing; dotted lines; fine patterns; free-space micro ink streams; micro capillaries array head; solid lines; Aluminum; Fabrication; Filters; Ink; Liquid crystal displays; Lithography; Printing; Production; Silicon; Sputter etching;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906558