Title :
Ciliary motion actuator using self-oscillating gel
Author :
Tabata, O. ; Hirasawa, H. ; Aoki, S. ; Yoshida, R. ; Kokufuta, E.
Author_Institution :
Ritsumeikan Univ., Kyoto, Japan
Abstract :
A ciliary motion actuator made of self-oscillating polymer gel has been demonstrated. The actuator was made of polymer gel and a micro projection array was formed on the surface. It was fabricated by moving mask deep X-ray lithography (M/sup 2/DXL) technique and micro molding technique. The polymer gel exhibited spontaneous swelling-deswelling oscillations and dynamic rhythm was created in the array structure. It was demonstrated that this oscillation propagated in the gel with projection array.
Keywords :
X-ray lithography; gels; microactuators; moulding; swelling; array structure; ciliary motion actuator; dynamic rhythm; micro molding technique; micro projection array; moving mask deep X-ray lithography; self-oscillating polymer gel; spontaneous swelling-deswelling oscillations; Actuators; Chemicals; Fabrication; Frequency; Heart; Microactuators; Polymer gels; Pulse generation; Rhythm; X-ray lithography;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906562
