An experimental comparison of PI, inversion, and damping control for high performance nanopositioning

This article compares the performance of three feedback control methodologies for high performance nanopositioning applications. Integral resonance damping control is a new approach for controlling mechanical systems. In this approach, the system resonances are actively damped rather than inverted which maximizes the closed-loop bandwidth and provides robustness to changes in the resonance frequencies. This technique is comprehensively compared to the standard methods of PI and inversion control in a practical environment. A five times improvement in the settling-time and bandwidth is demonstrated.