DocumentCode :
2916166
Title :
Optimisation of a two-wire thermal sensor for flow and sound measurements
Author :
van Honschoten, J.W. ; Krijnen, G.J.M. ; Svetovoy, V.B. ; de Bree, H.-E. ; Elwenspoek, M.C.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
fYear :
2001
fDate :
25-25 Jan. 2001
Firstpage :
523
Lastpage :
526
Abstract :
The Microflown is an acoustic sensor measuring particle velocity instead of pressure, which is usually measured by conventional microphones. In this paper an analytical model is presented to describe the physical processes that govern the behaviour of the sensor and determine its sensitivity. The Microflown consists of two heaters that act simultaneously as sensors. Forced convection by an acoustic wave leads to a small perturbation of this temperature profile, resulting in a temperature difference between the two sensors. This temperature difference, to which the sensitivity is proportional, is calculated with perturbation theory. Consequently the frequency dependent behaviour of the sensitivity is analysed; it is found that there are two important corner frequencies, the first related to the time constant velocity of heat diffusion between the sensors, the second related to the heat capacity of the heaters. The developed model is verified by experiments. Previously a very good model has been given for the performance of the Microflown in a channel, i.e. with both heaters between fixed walls walls in the positive and negative z-direction. Here, a model is presented that describes the situation of the present used sensors: without walls under and above them. Model predictions are compared to experimental results.
Keywords :
acoustic transducers; flow measurement; microphones; microsensors; particle velocity analysis; perturbation theory; temperature sensors; Microflown; acoustic sensor; analytical model; corner frequency; design optimisation; flow measurement; heat capacity; heat diffusion; heater; microphone; particle velocity measurement; perturbation theory; sensitivity; sound measurement; temperature distribution; time constant; two-wire thermal sensor; Acoustic measurements; Acoustic sensors; Analytical models; Microphones; Particle measurements; Pressure measurement; Sensor phenomena and characterization; Temperature sensors; Thermal sensors; Velocity measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
ISSN :
1084-6999
Print_ISBN :
0-7803-5998-4
Type :
conf
DOI :
10.1109/MEMSYS.2001.906594
Filename :
906594
Link To Document :
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