• DocumentCode
    2916274
  • Title

    An integrated gas sensor technology using surface micro-machining

  • Author

    Chan, P.C.H. ; Gui-Zhen Yan ; Lie-Yi Sheng ; Sharma, R.K. ; Zhenan Tang ; Sin, J.K.O. ; I-Ming Hsing ; Yangyuan Wang

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., China
  • fYear
    2001
  • fDate
    25-25 Jan. 2001
  • Firstpage
    543
  • Lastpage
    546
  • Abstract
    We report the silicon based integrated gas sensor technology using surface micro-machined micro-hotplate. Using this technology, an integrated gas sensor sensitive to 1 ppm of carbon monoxide was demonstrated. This approach was extended to integrated gas sensor array application.
  • Keywords
    carbon compounds; gas sensors; micromachining; microsensors; CO; Si; carbon monoxide detection; micro-hotplate; silicon integrated gas sensor; surface micromachining; Air gaps; Bridge circuits; Chemical technology; Etching; Fabrication; Gas detectors; Insulation; Sensor arrays; Silicon; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
  • Conference_Location
    Interlaken, Switzerland
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-5998-4
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2001.906599
  • Filename
    906599
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2916274