Title :
An integrated gas sensor technology using surface micro-machining
Author :
Chan, P.C.H. ; Gui-Zhen Yan ; Lie-Yi Sheng ; Sharma, R.K. ; Zhenan Tang ; Sin, J.K.O. ; I-Ming Hsing ; Yangyuan Wang
Author_Institution :
Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., China
Abstract :
We report the silicon based integrated gas sensor technology using surface micro-machined micro-hotplate. Using this technology, an integrated gas sensor sensitive to 1 ppm of carbon monoxide was demonstrated. This approach was extended to integrated gas sensor array application.
Keywords :
carbon compounds; gas sensors; micromachining; microsensors; CO; Si; carbon monoxide detection; micro-hotplate; silicon integrated gas sensor; surface micromachining; Air gaps; Bridge circuits; Chemical technology; Etching; Fabrication; Gas detectors; Insulation; Sensor arrays; Silicon; Temperature sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906599
