CMOS based sensors: From a sample to real products

Author

Mayer, Felix

Author_Institution

Sensirion Inc., Zurich

fYear

2008

fDate

13-17 Jan. 2008

Firstpage

1

Lastpage

5

Abstract

Sensirion [1] is a high-tech sensor company with headquarters in Switzerland. Based on technological concepts developed in the mid 90 s at ETH Zurich, Sensirion was founded in 1998. Product development started in the same year. Today, Sensirion is a high-tech sensor company, with a highly skilled team of more than 120 employees. About 50% of the manpower is concentrated in R&D. Sensirion successfully manufactures millions of MEMS sensors each year for a wide range of industrial, consumer, medical, and automotive applications. Sensirion is the industry leader for chip based humidity & temperature sensors, mass flow measurement and control devices for gases and liquids, and differential pressure sensors.

Keywords

CMOS integrated circuits; flow measurement; flow sensors; humidity sensors; microsensors; pressure sensors; temperature sensors; CMOS based sensors; MEMS sensors; Sensirion; Switzerland; automotive application; chip based humidity sensor; chip based temperature sensor; control devices; differential pressure sensor; high-tech sensor company; industrial application; mass flow measurement; product development; Automotive applications; CMOS technology; Fluid flow measurement; Gas industry; Humidity; Industrial control; Manufacturing industries; Micromechanical devices; Product development; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on

Conference_Location

Tucson, AZ

ISSN

1084-6999

Print_ISBN

978-1-4244-1792-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2008.4443578

Filename

4443578