DocumentCode
2916837
Title
A review of diamond-like carbon technology
Author
Chalker, P.R.
Author_Institution
Harwell Lab., AEA Technol., Didcot, UK
fYear
1997
fDate
35544
Firstpage
42370
Lastpage
42371
Abstract
The current status of diamond-like carbon (DLC) technology and the demonstration of rudimentary devices illustrate the scope for these materials in a number of sensor and actuator applications
Keywords
carbon; C; actuators; diamond-like carbon technology; review; sensors;
fLanguage
English
Publisher
iet
Conference_Titel
Extremely Hard Materials for Micromechanics (Digest No: 1997/059), IEE Colloquium on
Conference_Location
London
Type
conf
DOI
10.1049/ic:19970333
Filename
640865
Link To Document