Title :
Novel concave-based micro optical components
Author :
Hsiao, Sheng-Yi ; Lee, Chih-Chun ; Fang, Weileun
Author_Institution :
Nat. Tsing Hua Univ., Hsinchu
Abstract :
This research demonstrates three novel concave-based micro optical components. A double-concave (DCV) lens is realized by a simple polymer dispensing and sucking process. The DCV component consists of a high-aspect-ratio lens frame structure and dispensed UV-curable polymer lens. Moreover, this study further employs the process for DCV to implement the concave-mirror and the doublet. The measurements show a typical DCV (made of NOA63 polymer) has negative focal lengths of -1.42 mm (for 632.8 nm red-laser) and -1.17 mm (for 473 nm blue-laser), and a typical concave mirror has a focal-length of 3.28mm. The NOA63/PDMS doublet is also demonstrated.
Keywords :
microlenses; mirrors; optical design techniques; optical fabrication; optical polymers; NOA63 polymer; concave mirror; concave-based micro optical components; dispensed UV-curable polymer lens; double-concave lens; high-aspect-ratio lens frame structure; polymer dispensing process; sucking process; Curing; Lenses; Microoptics; Mirrors; Optical devices; Optical imaging; Optical microscopy; Optical polymers; Polymer films; Shape;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443608
