A MEMS read-write head for ferroelectric probe storage

We report a novel MEMS read-write head for probe data storage using ferroelectric (FE) media. In our FE storage approach, the minimum bit length is not dependent on the physical dimension of the writer electrode, which simplifies the writer fabrication. FE media has the advantages of high thermal stability, narrow domain walls, and low-voltage writability compared with magnetic storage. A read-write head based on MEMS technology is presented, along with process details. Preliminary test results on a scan stand show an obtainable areal density approaching 1 Tb/in² with our prototype head and media.