• DocumentCode
    2917315
  • Title

    Influence of the substrate on the lifetime of capacitive RF MEMS switches

  • Author

    Czarnecki, P. ; Rottenberg, X. ; Soussan, P. ; Ekkels, P. ; Muller, P. ; Nolmans, P. ; De Raedt, W. ; Tilmans, H.A.C. ; Puers, R. ; Marchand, L. ; De Wolf, I.

  • Author_Institution
    lMEC, Leuven
  • fYear
    2008
  • fDate
    13-17 Jan. 2008
  • Firstpage
    172
  • Lastpage
    175
  • Abstract
    We show for the first time that the substrate can influence the lifetime of capacitive RF MEMS switches. We demonstrate that the influence of the substrate should not be ignored. The influence of the environment on the lifetime of a switch is different when it is fabricated on two different substrates. We also present that a switch actuated with a DC voltage lower than the pull-in voltage can pull-in after some time. The goal of the performed experiment was to emphasize the charging of the substrate. The presented results help to understand the substrate charging problem.
  • Keywords
    microswitches; capacitive RF MEMS switches; pull-in voltage; Capacitance measurement; Capacitance-voltage characteristics; Dielectric devices; Dielectric substrates; Failure analysis; Radiofrequency microelectromechanical systems; Stress measurement; Switches; Testing; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
  • Conference_Location
    Tucson, AZ
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-1792-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2008.4443620
  • Filename
    4443620
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2917315