DocumentCode
2917478
Title
Explosive trace detection with FBAR-based sensor
Author
Lin, Anderson ; Yu, Hongyu ; Waters, Michael S. ; Kim, Eun Sok ; Goodman, Steven D.
Author_Institution
Univ. of Southern California, Los Angeles
fYear
2008
fDate
13-17 Jan. 2008
Firstpage
208
Lastpage
211
Abstract
This paper describes explosive trace detection through mass sensing with film bulk acoustic resonator (FBAR) coated with antibodies. Mass sensing for a specific explosive is done with the use of antibody made specifically for the targeted explosive. Antibodies were immobilized on the backside of FBAR mass sensors using an antibody immobilization protocol. When the specific explosive is exposed to the sensor, it binds to the antibody on the sensor, causing a shift in the resonant frequency of the FBAR sensor. This sensing technique has been shown to selectively detect vapor traces of TNT (trinitrotoluene, a common explosive) and RDX (cyclotrimethylenetrinitramine which has one of the lowest vapor pressures among various explosives) without any pre-concentrator.
Keywords
acoustic resonators; bulk acoustic wave devices; explosives; gas sensors; mass measurement; microsensors; FBAR-based sensor; RDX; TNT; antibody immobilization protocol; cyclotrimethylenetrinitramine; explosive trace detection; film bulk acoustic resonator; mass sensing; mass sensors; resonant frequency; trinitrotoluene; vapor trace detection; Acoustic sensors; Electrodes; Explosives; Fabrication; Film bulk acoustic resonators; Gold; Polarization; Proteins; Silicon; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location
Tucson, AZ
ISSN
1084-6999
Print_ISBN
978-1-4244-1792-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2008.4443629
Filename
4443629
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