DocumentCode :
2917571
Title :
Evaluation of chemical reaction kinetics using a thermally active piezoresistive microcantilever array
Author :
Choudhury, A. ; Vujanic, R. ; Hesketh, P.J. ; Thundat, T. ; Hu, Z.
Author_Institution :
Georgia Inst. of Technol., Atlanta
fYear :
2008
fDate :
13-17 Jan. 2008
Firstpage :
228
Lastpage :
231
Abstract :
This work investigates the evaluation of chemical reaction kinetics with a piezoresistive microcantilever array. By controlling the temperature of individual cantilevers in the array, the reaction constants can be measured at a single analyte concentration in one measurement. Adsorption and desorption of 6-mercaptohexanol on a gold-functionalized cantilever was studied at 21degC and 50degC. Current results show that desorption rates of mercaptohexanol depend on mass transport parameters. Activation energy of the desorption reaction in dry N2 is evaluated as DeltaE = -5.85 kJ/mol.
Keywords :
adsorption; cantilevers; chemical sensors; desorption; gold; microsensors; oxidation; piezoresistive devices; reaction rate constants; sensor arrays; 6-mercaptohexanol; Au; activation energy; adsorption reaction; analyte concentration; chemical reaction kinetics; desorption reaction; gold-functionalized cantilever; mass transport parameters; reaction constants; temperature 21 C; temperature 50 C; thermally active piezoresistive microcantilever array; Chemical analysis; Chemical engineering; Chemical sensors; Chemical technology; Kinetic theory; Mechanical engineering; Piezoresistance; Semiconductor device measurement; Stress; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
ISSN :
1084-6999
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2008.4443634
Filename :
4443634
Link To Document :
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