DocumentCode
2917583
Title
Micromechanics-the state of the art
Author
Syms, R.R.A.
Author_Institution
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
fYear
1997
fDate
35544
Firstpage
42522
Lastpage
42528
Abstract
Micromechanics is now well established as a scientific discipline. Throughout the world, industrial companies and academic institutions are combining to create new products based on miniature mechanical components fabricated by various modifications of VLSI technology. This survey paper will describe the current world status of micromechanics, under the general headings of materials, fabrication processes, mechanical principles and structures and applications
Keywords
micromechanical devices; micromechanics; survey;
fLanguage
English
Publisher
iet
Conference_Titel
Extremely Hard Materials for Micromechanics (Digest No: 1997/059), IEE Colloquium on
Conference_Location
London
Type
conf
DOI
10.1049/ic:19970338
Filename
640869
Link To Document