Title :
MEMS for sensing high current overload
Author :
Kim, Bruce C. ; Kasim, Rahim
Author_Institution :
Intel Corp., Univ. of Alabama, Birmingham, AL, USA
Abstract :
This paper presents a design and fabrication of advanced MEMS in high power applications. The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are mass actuated by an external magnetic field.
Keywords :
circuit breakers; microswitches; power electronics; MEMS devices; circuit breaker; distributed power network; high current overload sensing; high power applications; low-power MEMS switches; Bridge circuits; Circuit breakers; Coils; Magnetic fields; Magnetic switching; Micromechanical devices; Microswitches; Nickel; Permanent magnets; Switches; MEMS; MEMS circuit breaker; power distribution;
Conference_Titel :
Mixed-Signals, Sensors and Systems Test Workshop (IMS3TW), 2010 IEEE 16th International
Conference_Location :
La Grande Motte
Print_ISBN :
978-1-4244-7792-0
Electronic_ISBN :
978-1-4244-7791-3
DOI :
10.1109/IMS3TW.2010.5503015
