DocumentCode
2917650
Title
MEMS for sensing high current overload
Author
Kim, Bruce C. ; Kasim, Rahim
Author_Institution
Intel Corp., Univ. of Alabama, Birmingham, AL, USA
fYear
2010
fDate
7-9 June 2010
Firstpage
1
Lastpage
6
Abstract
This paper presents a design and fabrication of advanced MEMS in high power applications. The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are mass actuated by an external magnetic field.
Keywords
circuit breakers; microswitches; power electronics; MEMS devices; circuit breaker; distributed power network; high current overload sensing; high power applications; low-power MEMS switches; Bridge circuits; Circuit breakers; Coils; Magnetic fields; Magnetic switching; Micromechanical devices; Microswitches; Nickel; Permanent magnets; Switches; MEMS; MEMS circuit breaker; power distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Mixed-Signals, Sensors and Systems Test Workshop (IMS3TW), 2010 IEEE 16th International
Conference_Location
La Grande Motte
Print_ISBN
978-1-4244-7792-0
Electronic_ISBN
978-1-4244-7791-3
Type
conf
DOI
10.1109/IMS3TW.2010.5503015
Filename
5503015
Link To Document