Title :
Smart drivers for online diagnosis of electrostatic MEMS actuators
Author :
Dumas, N. ; Latorre, L. ; Mailly, F. ; Nouet, P.
Abstract :
This paper introduces the design of High-Voltage CMOS drivers for Electrostatic MEMS switches. In order to perform online diagnosis, the proposed architecture implements a dedicated circuitry that can detect the pull-in event. This way, stuck or broken switches are identified during operation. The pull-in event corresponds to a rapid change in the actuation capacitance thus producing a current peak during actuation. The idea is therefore to measure the charging current, using a differential method that cancels the effects of any parallel parasitic capacitance.
Keywords :
CMOS integrated circuits; driver circuits; electrostatic actuators; microactuators; microswitches; actuation capacitance; differential method; electrostatic MEMS actuator online diagnosis; electrostatic MEMS switches; high-voltage CMOS drivers; parallel parasitic capacitance; smart drivers; Capacitance measurement; Current measurement; Driver circuits; Electrostatic actuators; Event detection; Intelligent actuators; Micromechanical devices; Microswitches; Parasitic capacitance; Switches; CMOS; Diagnosis; Electrostatic Actuator; MEMS; Switch;
Conference_Titel :
Mixed-Signals, Sensors and Systems Test Workshop (IMS3TW), 2010 IEEE 16th International
Conference_Location :
La Grande Motte
Print_ISBN :
978-1-4244-7792-0
Electronic_ISBN :
978-1-4244-7791-3
DOI :
10.1109/IMS3TW.2010.5503018
