A study on ohmic contact of different metal contact materials on nanostructured Titanium Dioxide (TiO2) Thin Film

Author

Musa, M.Z. ; Sarah, M.S.P. ; Shariffudin, S.S. ; Mamat, M.H. ; Rusop, M.

Author_Institution

Solar Cell Lab., Univ. Teknol. MARA (UiTM), Shah Alam, Malaysia

fYear

2010

fDate

11-14 April 2010

Firstpage

412

Lastpage

414

Abstract

Three different type of materials i.e Au, Pt, and Pd have been investigated as metal contact on Titanium Dioxide (TiO₂) thin films. These metal contacts have been deposited using sputter coating method. Meanwhile sol-gel spin coating method has been chosen to deposits TiO₂ thin film. The ohmic contact characteristic of the three materials has been studied using Current-Voltage measurement.

Keywords

gold; nanostructured materials; ohmic contacts; palladium; platinum; semiconductor thin films; sol-gel processing; spin coating; sputtered coatings; titanium compounds; Au; Pd; Pt; TiO₂; current-voltage measurement; metal contact materials; nanostructured titanium dioxide thin film; ohmic contact; sol-gel spin coating; sputter coating; Coatings; Conductivity; Gold; Inorganic materials; Nanostructured materials; Ohmic contacts; Sputtering; Thin film devices; Titanium; Transistors; Characterization; Nanostructured; Ohmic contact; Work function;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Devices, Systems and Applications (ICEDSA), 2010 Intl Conf on

Conference_Location

Kuala Lumpur

Print_ISBN

978-1-4244-6629-0

Type

conf

DOI

10.1109/ICEDSA.2010.5503028

Filename

5503028