Title :
Electrical properties of ZnO thin films prepared by sol-gel technique
Author :
Malek, M.F. ; Zakaria, N. ; Sahdan, M.Z. ; Mamat, M.H. ; Khusaimi, Z. ; Rusop, M.
Author_Institution :
Fac. of Electr. Eng., Univ. Teknol. MARA, Shah Alam, Malaysia
Abstract :
Zinc Oxide (ZnO) thin films were deposited on a glass substrate by sol-gel process dip-coating method. Zinc acetate dehydrate Zn(O2 CCH3)2(H2O)2 are used as a starting material while 2-methoxyethanol (C3H8O2) and monoethanolamine (MEA) are used as a solvent and stabilizer. The molar ratio of zinc acetate dihydrate to MEA is 1:1. The molarity of the solution and pre-heating temperature were kept constant at 0.4M and 150°C. Annealing temperature was fixed at 550°C but the withdrawal speed was varied from 1 mm/s to 9 mm/s. The effects of withdrawal speed on electrical and surface morphology of the ZnO thin films have been investigated. The electrical and surface morphology properties of the ZnO thin films were characterized by I-V measurement and atomic force microscopy (AFM). The electrical measurement showed that current decrease when the withdrawal speed increases. High conductivity at 5.87×10-4 S/cm and lowest resistivity about 1.7×103 Ω/cm have been obtained for 1 mm/s withdrawal speed. AFM micrographs showed average grain size of ZnO thin films increases from 120.862 nm to 138.521 nm with an increasing in withdrawal speed.
Keywords :
II-VI semiconductors; annealing; atomic force microscopy; dip coating; electrical conductivity; electrical resistivity; grain size; semiconductor thin films; sol-gel processing; surface morphology; wide band gap semiconductors; zinc compounds; 2-methoxyethanol; AFM; I-V measurement; annealing temperature; atomic force microscopy; conductivity; grain size; molarity; monoethanolamine; resistivity; size 120.862 nm; size 138.521 nm; sol-gel process dip coating; surface morphology; temperature 150 degC; temperature 550 degC; withdrawal speed; zinc oxide thin films; Atomic force microscopy; Atomic measurements; Conductivity; Electric variables measurement; Force measurement; Sputtering; Surface morphology; Temperature; Transistors; Zinc oxide; Dip-Coating; Sol-gel; Zinc Oxide; ZnO;
Conference_Titel :
Electronic Devices, Systems and Applications (ICEDSA), 2010 Intl Conf on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4244-6629-0
DOI :
10.1109/ICEDSA.2010.5503037