• DocumentCode
    2918144
  • Title

    Electrical conductivity characteristics of TiO2 thin film

  • Author

    Sarah, M.S.P. ; Musa, M.Z. ; Asiah, M.N. ; Rusop, M.

  • Author_Institution
    Solar Cell Lab., UiTM, Shah Alam, Malaysia
  • fYear
    2010
  • fDate
    11-14 April 2010
  • Firstpage
    361
  • Lastpage
    364
  • Abstract
    Titanium Dioxide (TiO2) thin film has been synthesized using sol-gel method and deposited onto glass substrates using spin coating technique. These thin films are then annealed at various temperatures. The electrical and structural characterizations of the as deposited and annealed films were carried out using IV measurement with 4-point probe equipment and scanning electron microscopy (SEM). From this study, it is known that, electrical properties were influenced by changes of annealing temperature. Resistivity of thin films was found to decrease as the annealing temperatures increase. Also indicate in this paper the surface morphology of the thin film.
  • Keywords
    annealing; electrical conductivity; electrical resistivity; scanning electron microscopy; semiconductor growth; semiconductor thin films; sol-gel processing; spin coating; surface morphology; titanium compounds; wide band gap semiconductors; IV measurement; SEM; annealing; electrical conductivity; resistivity; scanning electron microscopy; sol-gel method; spin coating; surface morphology; titanium dioxide thin film; Annealing; Coatings; Conductivity; Glass; Scanning electron microscopy; Sputtering; Substrates; Temperature; Titanium; Transistors; annealing temperature; conductivity; resistivity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Devices, Systems and Applications (ICEDSA), 2010 Intl Conf on
  • Conference_Location
    Kuala Lumpur
  • Print_ISBN
    978-1-4244-6629-0
  • Type

    conf

  • DOI
    10.1109/ICEDSA.2010.5503040
  • Filename
    5503040