DocumentCode
2918144
Title
Electrical conductivity characteristics of TiO2 thin film
Author
Sarah, M.S.P. ; Musa, M.Z. ; Asiah, M.N. ; Rusop, M.
Author_Institution
Solar Cell Lab., UiTM, Shah Alam, Malaysia
fYear
2010
fDate
11-14 April 2010
Firstpage
361
Lastpage
364
Abstract
Titanium Dioxide (TiO2) thin film has been synthesized using sol-gel method and deposited onto glass substrates using spin coating technique. These thin films are then annealed at various temperatures. The electrical and structural characterizations of the as deposited and annealed films were carried out using IV measurement with 4-point probe equipment and scanning electron microscopy (SEM). From this study, it is known that, electrical properties were influenced by changes of annealing temperature. Resistivity of thin films was found to decrease as the annealing temperatures increase. Also indicate in this paper the surface morphology of the thin film.
Keywords
annealing; electrical conductivity; electrical resistivity; scanning electron microscopy; semiconductor growth; semiconductor thin films; sol-gel processing; spin coating; surface morphology; titanium compounds; wide band gap semiconductors; IV measurement; SEM; annealing; electrical conductivity; resistivity; scanning electron microscopy; sol-gel method; spin coating; surface morphology; titanium dioxide thin film; Annealing; Coatings; Conductivity; Glass; Scanning electron microscopy; Sputtering; Substrates; Temperature; Titanium; Transistors; annealing temperature; conductivity; resistivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Devices, Systems and Applications (ICEDSA), 2010 Intl Conf on
Conference_Location
Kuala Lumpur
Print_ISBN
978-1-4244-6629-0
Type
conf
DOI
10.1109/ICEDSA.2010.5503040
Filename
5503040
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