DocumentCode
2918276
Title
Post-hydrophilic treatment free plastic biochip fabrication method using polyurea film
Author
Shinohara, H. ; Takahashi, Y. ; Mizuno, J. ; Shoji, S.
Author_Institution
Waseda Univ., Tokyo
fYear
2008
fDate
13-17 Jan. 2008
Firstpage
367
Lastpage
370
Abstract
A novel low temperature bonding method was developed by using polyurea film as intermediate layers. A microchip having microchannel which has highly hydrophilic surface was realized by the pretreatment of VUV (vacuum ultraviolet) light irradiation. The bonding temperature was low enough to use thermo plastic channel plates such as PMMA (poly-methyl methacrylate) with negligible deformation of the channel structure. The results of contact angle measurements indicate that the highly hydrophilic surface of the microchannel was kept after the bonding process. For actual micro biochip fabrication, the post-hydrophilic treatment after bonding process can be skipped.
Keywords
bonding processes; microchannel flow; organic compounds; ultraviolet radiation effects; free plastic biochip; intermediate layers; low temperature bonding; microchannel; microchip; poly-methyl methacrylate; polyurea film; post-hydrophilic treatment; thermo plastic channel plates; vacuum ultraviolet light irradiation; Bonding processes; Chemical technology; Chemical vapor deposition; Costs; Fabrication; Microchannel; Plasma temperature; Plastic films; Polymer films; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location
Tucson, AZ
ISSN
1084-6999
Print_ISBN
978-1-4244-1792-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2008.4443669
Filename
4443669
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