Title :
Multi-model optimization in SWIM
Author :
White, K., Jr. ; Fowler, John W.
Author_Institution :
Dept. of Syst. Eng., Virginia Univ., Charlottesville, VA, USA
Abstract :
Improving the design and operation of semiconductor manufacturing facilities typically requires the application and integration of results derived from a range of related factory models. The Semiconductor Workbench for Integrated Modeling (SWIM) is an innovative software system that simplifies the task of working with multiple models. This paper describes the research and development leading to the incorporation of model optimization features with the SWIM framework
Keywords :
computer aided production planning; digital simulation; optimisation; semiconductor device manufacture; simulation; software packages; SWIM; Semiconductor Workbench for Integrated Modeling; hierarchical models; multi-model optimization; semiconductor manufacturing; simulation; software system; Application software; Computational modeling; Computer aided manufacturing; Computer integrated manufacturing; Design engineering; Optimization methods; Power system modeling; Production facilities; Software systems; Virtual manufacturing;
Conference_Titel :
Systems, Man, and Cybernetics, 1994. Humans, Information and Technology., 1994 IEEE International Conference on
Conference_Location :
San Antonio, TX
Print_ISBN :
0-7803-2129-4
DOI :
10.1109/ICSMC.1994.399840
