DocumentCode
2918685
Title
Closely spaced polymer microstructures as a unique tool for characterization at the small scales
Author
Zhao, Y.
Author_Institution
Ohio State Univ., Columbus
fYear
2008
fDate
13-17 Jan. 2008
Firstpage
459
Lastpage
462
Abstract
The paper reports a method to characterize polymer microstructures whose characteristic dimensions are on the order of or less than a few micrometers. The closely spaced polymer microstructures with appropriate aspect ratios were fabricated. The interstructural collapse was introduced into these microstructures by evaporating the solution where the microstructures were immerged. The collapse was investigated using the Euler beam theory, and validated using optical measurements. The dynamic behaviors of unstable interstructural collapse were also investigated. By providing an approach with greatly reduced complexity and cost, this work is expected to help characterization of mechanical properties of the polymers microstructures at the small scales, especially those for mechanical sensing purposes.
Keywords
deformation; evaporation; micromechanical devices; nonelectric sensing devices; plasticity; polymer structure; polymers; vibrations; viscoelasticity; Euler beam theory; aspect ratios; closely spaced polymer microstructures; dynamic behaviors; mechanical properties characterization; mechanical sensing; microdevices; optical measurements; solution evaporation; unstable interstructural collapse; Adhesives; Biological materials; Biomedical optical imaging; Costs; Mechanical factors; Microstructure; Optical materials; Optical polymers; Optical sensors; Semiconductor materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location
Tucson, AZ
ISSN
1084-6999
Print_ISBN
978-1-4244-1792-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2008.4443692
Filename
4443692
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