Title :
Closely spaced polymer microstructures as a unique tool for characterization at the small scales
Author_Institution :
Ohio State Univ., Columbus
Abstract :
The paper reports a method to characterize polymer microstructures whose characteristic dimensions are on the order of or less than a few micrometers. The closely spaced polymer microstructures with appropriate aspect ratios were fabricated. The interstructural collapse was introduced into these microstructures by evaporating the solution where the microstructures were immerged. The collapse was investigated using the Euler beam theory, and validated using optical measurements. The dynamic behaviors of unstable interstructural collapse were also investigated. By providing an approach with greatly reduced complexity and cost, this work is expected to help characterization of mechanical properties of the polymers microstructures at the small scales, especially those for mechanical sensing purposes.
Keywords :
deformation; evaporation; micromechanical devices; nonelectric sensing devices; plasticity; polymer structure; polymers; vibrations; viscoelasticity; Euler beam theory; aspect ratios; closely spaced polymer microstructures; dynamic behaviors; mechanical properties characterization; mechanical sensing; microdevices; optical measurements; solution evaporation; unstable interstructural collapse; Adhesives; Biological materials; Biomedical optical imaging; Costs; Mechanical factors; Microstructure; Optical materials; Optical polymers; Optical sensors; Semiconductor materials;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443692