• DocumentCode
    2918685
  • Title

    Closely spaced polymer microstructures as a unique tool for characterization at the small scales

  • Author

    Zhao, Y.

  • Author_Institution
    Ohio State Univ., Columbus
  • fYear
    2008
  • fDate
    13-17 Jan. 2008
  • Firstpage
    459
  • Lastpage
    462
  • Abstract
    The paper reports a method to characterize polymer microstructures whose characteristic dimensions are on the order of or less than a few micrometers. The closely spaced polymer microstructures with appropriate aspect ratios were fabricated. The interstructural collapse was introduced into these microstructures by evaporating the solution where the microstructures were immerged. The collapse was investigated using the Euler beam theory, and validated using optical measurements. The dynamic behaviors of unstable interstructural collapse were also investigated. By providing an approach with greatly reduced complexity and cost, this work is expected to help characterization of mechanical properties of the polymers microstructures at the small scales, especially those for mechanical sensing purposes.
  • Keywords
    deformation; evaporation; micromechanical devices; nonelectric sensing devices; plasticity; polymer structure; polymers; vibrations; viscoelasticity; Euler beam theory; aspect ratios; closely spaced polymer microstructures; dynamic behaviors; mechanical properties characterization; mechanical sensing; microdevices; optical measurements; solution evaporation; unstable interstructural collapse; Adhesives; Biological materials; Biomedical optical imaging; Costs; Mechanical factors; Microstructure; Optical materials; Optical polymers; Optical sensors; Semiconductor materials;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
  • Conference_Location
    Tucson, AZ
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-1792-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2008.4443692
  • Filename
    4443692