• DocumentCode
    2918724
  • Title

    Low cost fabrication of microfluidic microchannels for Lab-On-a-Chip applications

  • Author

    Bahadorimehr, A.R. ; Yunas, Jumril ; Majlis, B. Yeop

  • Author_Institution
    Inst. of Microengineering & Nanoelectron., Univ. Kebangsaan Malaysia, Bangi, Malaysia
  • fYear
    2010
  • fDate
    11-14 April 2010
  • Firstpage
    242
  • Lastpage
    244
  • Abstract
    Microfluidic systems are one of the new growing technologies which offer miniaturization of analysis systems. In this paper we present a simple and low cost fabrication of microchannels using in different applications in Micro Total Analysis Systems. This method uses typical microscopic glass slides as a substrate for fabrication of microchannels. Using photo-resist as a mask instead of some deposition methods makes the procedure more convenient and cost effective compare to other techniques. A smooth channel surface with acceptable sharp wall edges makes this procedure suitable for so many applications that vertical walls are not crucial. The comparison between fabrication of channels using wet etching procedures and molding techniques can help to select the more suitable one for any application which needs specific characteristics.
  • Keywords
    etching; lab-on-a-chip; microfluidics; photoresists; lab-on-a-chip applications; low cost fabrication; mask; micro total analysis systems; microfluidic microchannels; photoresist; smooth channel surface; typical microscopic glass slides; wet etching procedures; Costs; Fabrication; Glass; Lab-on-a-chip; Lithography; Microchannel; Microfluidics; Microscopy; Silicon; Wet etching; Glass; Lab-On-Chip; Micochannels; Microfluidics; PDMS; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Devices, Systems and Applications (ICEDSA), 2010 Intl Conf on
  • Conference_Location
    Kuala Lumpur
  • Print_ISBN
    978-1-4244-6629-0
  • Type

    conf

  • DOI
    10.1109/ICEDSA.2010.5503067
  • Filename
    5503067