Title :
Low cost fabrication of microfluidic microchannels for Lab-On-a-Chip applications
Author :
Bahadorimehr, A.R. ; Yunas, Jumril ; Majlis, B. Yeop
Author_Institution :
Inst. of Microengineering & Nanoelectron., Univ. Kebangsaan Malaysia, Bangi, Malaysia
Abstract :
Microfluidic systems are one of the new growing technologies which offer miniaturization of analysis systems. In this paper we present a simple and low cost fabrication of microchannels using in different applications in Micro Total Analysis Systems. This method uses typical microscopic glass slides as a substrate for fabrication of microchannels. Using photo-resist as a mask instead of some deposition methods makes the procedure more convenient and cost effective compare to other techniques. A smooth channel surface with acceptable sharp wall edges makes this procedure suitable for so many applications that vertical walls are not crucial. The comparison between fabrication of channels using wet etching procedures and molding techniques can help to select the more suitable one for any application which needs specific characteristics.
Keywords :
etching; lab-on-a-chip; microfluidics; photoresists; lab-on-a-chip applications; low cost fabrication; mask; micro total analysis systems; microfluidic microchannels; photoresist; smooth channel surface; typical microscopic glass slides; wet etching procedures; Costs; Fabrication; Glass; Lab-on-a-chip; Lithography; Microchannel; Microfluidics; Microscopy; Silicon; Wet etching; Glass; Lab-On-Chip; Micochannels; Microfluidics; PDMS; Wet etching;
Conference_Titel :
Electronic Devices, Systems and Applications (ICEDSA), 2010 Intl Conf on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4244-6629-0
DOI :
10.1109/ICEDSA.2010.5503067