Predicting the switching time of electrostatic actuators

In this work, new analytic expressions for the frequency of large vibrations and for the switching time, of electrostatic actuators, are presented. These expressions predict that the frequency and switching time are linearly related to specific measures of the applied voltage, on a logarithmic scale. Test devices were designed, fabricated, and characterized, and measurements are shown to be in very good agreement with predictions. These linear relations are important and relevant as design rules for development of fast and accurate switches.