Title :
Non-contact electrostatic micro-bearing using polymer electret
Author :
Tsurumi, Yukinori ; Suzuki, Yuji ; Kasagi, Nobuhide
Author_Institution :
Univ. of Tokyo, Tokyo
Abstract :
We propose a passive gap-spacing control method in order to avoid stiction between top and bottom structures for in-plane sensor/actuator applications. Patterned electret using a high-performance perfluoro polymer material is employed to induce repulsive electrostatic force. Out-of-plane repulsive force is successfully demonstrated with our early prototype both in air and liquid.
Keywords :
ball bearings; electrets; electrostatic devices; microactuators; microsensors; polymers; high-performance perfluoro polymer material; in-plane actuator; in-plane sensor; noncontact electrostatic microball bearing; out-of-plane repulsive force; passive gap-spacing control method; patterned polymer electret; repulsive electrostatic force; Electrets; Electrodes; Electrostatics; Force sensors; Mechanical engineering; Numerical simulation; Permittivity; Polymers; Prototypes; Testing;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443705
