Title :
Experiment on the Absolute Measurement of A Silicon Lattice Spacing at the NRLM
Author :
Nakayama, K. ; Tanaka, M. ; Kuroda, K.
Author_Institution :
National Research Laboratory of Metrology
Abstract :
An improvement of the x-ray and optical interferometer system is in progress for the absolute determination of the silicon
Conference_Titel :
Precision Electromagnetic Measurements, 1988. CPEM 88 Digest. 1988 Conference on
Conference_Location :
Ibaraki, Japan
DOI :
10.1109/CPEM.1988.671382
