Linear tuning of the resonant frequency in tilting oscillators by an axially loaded suspension flexure

In this work we present a novel approach for fine linear tuning of resonant frequency in tilting oscillators and investigate, both theoretically and experimentally, the main features and functionality of the tuning mechanism. The operation principle of the tuning mechanism is based on the application of an axial force to a cantilever-like suspension flexure, built in such a way that the real pivot is replaced by a virtual one, which provides a center of rotation. The axial force is provided by an electrostatic transducer realized in the framework of the single layer multiple close-gap electrodes actuation concept. Devices with three different types of suspensions were fabricated and characterized. Experimental and theoretical results collectively show that the suggested approach can be efficiently implemented for resonant frequency tuning in tilting devices.