Title :
A surface acoustic wave dynamics control device by grating structure
Author :
Miyashita, Masahiro ; Onuki, Teppei ; Nagasawa, Sumito ; Kuwano, Hiroshi
Author_Institution :
Tohoku Univ., Sendai
Abstract :
We have developed the dynamic controlling system of surface acoustic wave (SAW) using micro electromechanical structures, using a plate with periodic convex structures as a mechanical switch of the SAW´s resonant condition. The effects of the geographical change on the substrate surface by the active control were investigated using the numerical analysis. And we verified the effect of spectrum shaping by the engraved grating structure, and the controlling effect of the resonant condition with the control plate on the grating structure experimentally.
Keywords :
microswitches; numerical analysis; periodic structures; physical instrumentation control; surface acoustic wave devices; dynamic controlling system; engraved grating structure; mechanical switch; micro electromechanical structures; periodic convex structures; spectrum shaping; surface acoustic wave dynamics control device; Acoustic waves; Control systems; Gratings; Numerical analysis; Periodic structures; Resonance; Shape control; Surface acoustic wave devices; Surface acoustic waves; Switches;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443743
