• DocumentCode
    2919837
  • Title

    Rapid, localized synthesis of titanium-based nanoswords on MEMS

  • Author

    Sosnowchik, Brian D. ; Ha, Jong-Yoon ; Luo, Lei ; Lin, Liwei

  • Author_Institution
    Univ. of California at Berkeley, Berkeley
  • fYear
    2008
  • fDate
    13-17 Jan. 2008
  • Firstpage
    693
  • Lastpage
    696
  • Abstract
    Herein, we report the discovery of a uniquely-shaped, titanium-based nanostructure called a "nanosword," utilizing MEMS as the platform and using a rapid and localized induction heating system. The simple synthesis technique yields high-quality nanostructures with a rare shape that is broad and flat, tapering to a sharp tip with a curvature as low as 2 nm. Sans catalyst and self-sourced from an evaporated layer of titanium, they are synthesized in only 2-5 minutes by the selective heating of ring-shaped microstructures. Growth rates were observed to be 1- 2 mum/min and increases in both the nanosword quality and density were observed by increasing the synthesis temperature and source material volume, respectively. The resistivity averaged 0.192Omega-cm. Such high-quality, sharp-tipped nanostructures could be used in applications like nanoswitches, nanocantilevers, nanoprobes, or plasmonic applications such as surface-enhanced Raman spectroscopy and apertureless near-field scanning optical microscopy.
  • Keywords
    catalysts; induction heating; micromechanical devices; nanostructured materials; titanium; MEMS; Ti; growth rates; localized induction heating system; ring-shaped microstructures; sharp-tipped nanostructures; time 2 min to 5 min; titanium-based nanostructure; titanium-based nanoswords; Conductivity; Heating; Micromechanical devices; Microstructure; Nanostructured materials; Optical materials; Optical microscopy; Shape; Temperature; Titanium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
  • Conference_Location
    Tucson, AZ
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-1792-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2008.4443751
  • Filename
    4443751