Activation of CNT nano-to-micro contact via electrical breakdown

The "healing" of nano-to-micro electrical contact between a single carbon nanotube (CNT) and silicon micro structure has been demonstrated using the technique of electrical breakdown. Experimental results show that the resistance of an in-situ synthesized CNT was "healed" from an original value of infinite to 7 MOmega. The experimental breakdown voltage is 10 V and the electrical field is estimated as 5times10⁷ V/cm for a 2 nm-thick native oxide layer, which is consistent with the analytical breakdown value. This process helps improving the resistance of nano-to-micro contacts and increase device yield by activating seemingly non-functional CNTs in nano electromechanical systems (NEMS).