A large-aperture, piston-tip-tilt micromirror for optical phase array applications

Author

Wu, L. ; Maley, S.B. ; Dooley, S.R. ; Nelson, T.R. ; McManamon, P.F. ; Xie, H.

Author_Institution

Univ. of Florida, Gainesville

fYear

2008

fDate

13-17 Jan. 2008

Firstpage

754

Lastpage

757

Abstract

This paper reports the design, fabrication and characterization of a 4x4 micromirror array consisting of piston-tip-tilt electrothermal MEMS mirrors. Each mirror has an optical aperture size of 0.5x0.5 mm². Both tip and tilt angles of over plusmn30deg are obtained at less than 5 Vdc, and the piston displacement reaches 215 mum at 4 Vdc. Two-dimensional scanning was demonstrated. Thermal analysis and transient response were also reported.

Keywords

micro-optomechanical devices; microactuators; micromirrors; optical arrays; optical design techniques; optical fabrication; thermal analysis; lateral-shift-free large-vertical-displacement actuator; micromirror array design; optical aperture; optical phase array applications; piston displacement; piston-tip-tilt electrothermal MEMS mirrors; size 0.5 mm; thermal analysis; transient response; two-dimensional scanning; Apertures; Electrothermal effects; Micromechanical devices; Micromirrors; Mirrors; Optical arrays; Optical device fabrication; Phased arrays; Pistons; Transient analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on

Conference_Location

Tucson, AZ

ISSN

1084-6999

Print_ISBN

978-1-4244-1792-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2008.4443766

Filename

4443766