Micro-mirror On Ribbon-actuator (MOR) for high speed spatial light modulator

To realize a high throughput optical mask-less lithography (OML) which is utilized for the semiconductor integrated circuit (IC) mass fabrication, we have been studying the high speed spatial light modulator (SLM). In this paper, we report a Micro-mirror On Ribbon-actuator (MOR) as a novel MEMS SLM. The MOR consists of a ribbon actuator which carries a mirror placed on the offset position. The mirror tilts when the ribbon actuator is bent by electrostatic force. The high speed driving of the MOR is realized by the high resonant frequency of the ribbon actuator and the large damping factor of the submicron gap. The MOR showed the routinely switching response of less than 3 musec and the resonant frequency of around 1.7 MHz. The 8times8 passive matrix drive of the MOR was also demonstrated.